Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.
Publishing Model:Subscription
ISSN:0734-2101
|EISSN:1520-8559
|Publication Frequency:Seven times a year
|Last updated on 01 May 2026 / Current volume: 鋺鋺 / Current issue: 杚